UNIT流量计 UFC-8165 UFC-1101

AMAT0190-51152喷射阀HORIBAIV-2401AV-02h

HORIBA IV-2410AV-03/AMAT3030-10059喷射阀

mks真空计356004-YG-T

3D80-000906-42 SENSOR,EPD SEPDHVTY-SD-1024

mks360/370 Stabil-Ion Gauge Part Number:360190

AE Paramount1513电源3156310-020 3156310-032 315631

AE Paramount1513电源3156310-020 3156310-032 315631

LAM P/N853-800087-404电源

LF-310A-EVDHoriba Stec,LFC, Ta(OC2H5)5, 0.2g/min,

Tylan MFC 2900 series FM-3900MEP, N2 Gas, Range 20

AMAT 0195-14327电源Granville-Phillips 隔膜规390628-0-YE

HORIBA STEC S500 氧气100sccm 两端气路六毫米软管接头

ebara A70W真空泵英福康Cdg025d 0.1torr

HORIBA流量计LF-F20M-A TEPO 0.1g/min，RS485通讯，1/8接头VC